International Journal of Application or Innovation in Engineering & Management
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ISSN 2319 – 4847
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Call for Paper, Published Articles, Indexing Infromation Electrical characteristics and plasma diagnostics of (Ar/O2) gas mixture glow Discharge , Authors : Mohammed K. Khalaf, Ibrahim. R. Agool , Shaimaa H. Abd Muslim, International Journal of Application or Innovation in Engineering & Management (IJAIEM), www.ijaiem.org
Volume & Issue no: Volume 3, Issue 8, August 2014

Title:
Electrical characteristics and plasma diagnostics of (Ar/O2) gas mixture glow Discharge
Author Name:
Mohammed K. Khalaf, Ibrahim. R. Agool , Shaimaa H. Abd Muslim
Abstract:
ABSTRACT The oxygen plasma has many important applications in the semiconductor industry. When addition a small amount of oxygen gas can significantly change the plasma characteristics, In this paper, The current –volt, characteristic curve and breakdown potential have been measured at different O2 percentage in (Ar/O2) gas mixture, the measurements show that the addition of oxygen leads to decrease in the discharge current at the same discharge voltage and gas pressure. Contrary, the lower breakdown potential at lower O2 percentage the minimum breakdown voltages were found (320 , , 347, 370, 400 )volt at (10%, 50%, 75%, 100% )O2 percentage respectively. The electron temperature and density calculated from I-V curve of single Langmuir probe at pressure (0.14) mbar for different O2 percentage. We observed two different groups of electrons characterized by different temperature and density, the result showed that the electron temperature increase with the addition of O2. While, the electron density decreased with increase percentage O2. Keywords: glow discharge, Paschen s law, plasma diagnosed, Langmuir probe.
Cite this article:
Mohammed K. Khalaf, Ibrahim. R. Agool , Shaimaa H. Abd Muslim , " Electrical characteristics and plasma diagnostics of (Ar/O2) gas mixture glow Discharge " , International Journal of Application or Innovation in Engineering & Management (IJAIEM), Volume 3, Issue 8, August 2014 , pp. 113-119 , ISSN 2319 - 4847.
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