International Journal of Application or Innovation in Engineering & Management
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Call for Paper, Published Articles, Indexing Infromation Effects of proton beam energy on the sensitivity and Contrast of some resists, Authors : Batool Daram Balawa, International Journal of Application or Innovation in Engineering & Management (IJAIEM), www.ijaiem.org
Volume & Issue no: Volume 3, Issue 12, December 2014

Title:
Effects of proton beam energy on the sensitivity and Contrast of some resists
Author Name:
Batool Daram Balawa
Abstract:
ABSTRACT Poly [g-metha cryloyloxypropyltris (trimethylsiloxylsilane) or PMOTSS is an intrinsically negative resist. Alpha most poly (alkylmethacrylates) are positive resist. The inherent sensitivity of (PMOTSS) expressed as product of the lectron beam (gel) dose and the weight-average molecular weight(Di gô€€€,is comparable to those of the (polyhalostryrenes). Although the (PMOTss) homopolymer is rubbery copolymers of MOTSS and halostyrenes (HS) are hard and glass and suitable for use as the top imaging layer of a bilayer resist for electron beam and masked ion beam lithography. The sensitivity of each copolymer is a function of its molecular weight and the inherent sensitivity and mole fraction of the (HS) for each resist. The half thickness sensitivity decreased and the contrast increased with increasing proton beam energy over the range of (90-250)KeV. The sensitivity decreased and the contrast increased further for irradiation with (20)KeV electrons. The influence of the proton beam energy is most pronounced for those copolymers that have the poorest sensitivity. Keyword:- Proton Beam Energy, Inherent Sensitivity, Contrast Resist(Positive ,Negative), Weight average Molecular Weight
Cite this article:
Batool Daram Balawa , " Effects of proton beam energy on the sensitivity and Contrast of some resists " , International Journal of Application or Innovation in Engineering & Management (IJAIEM), Volume 3, Issue 12, December 2014 , pp. 160-166 , ISSN 2319 - 4847.
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